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[PLAZMARK Use Case] MEMS Component Manufacturer Process Management Department

Easily and instantly grasp the current status of the equipment! A case where a significant improvement in production quality was observed.

We would like to introduce a case where the process management department of a MEMS component manufacturer implemented the "PLAZMARK Wafer Type." We manufacture high value-added MEMS components tailored to customer needs, but due to the small lot production of various types, we were struggling to improve yield. There was also the challenge that the initial costs of introducing inspection equipment into the production process were too high. After trying this product, we found that extreme variations could be easily identified visually. For subtle variations, using a color difference meter allowed for high-precision management, and obtaining internal approval for the introduction of the color difference meter was very smooth. [Case Overview] ■ Challenges - Whether plasma treatment on the wafer is being performed uniformly - The burden of initial costs for equipment introduction is significant given the current production volume *For more details, please refer to the related links or feel free to contact us.

  • Plasma Generator
  • Evaluation Board

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